Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658615 | Method of forming coating film and apparatus therefor | Keizo Hasebe, Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Masatoshi Deguchi +1 more | 1997-08-19 |
| 5626675 | Resist processing apparatus, substrate processing apparatus and method of transferring a processed article | Yasuhiro Sakamoto, Masami Akimoto, Kiyohisa Tateyama | 1997-05-06 |