Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5651160 | Cleaning apparatus for cleaning substrates | Akira Yonemizu | 1997-07-29 |
| 5626675 | Resist processing apparatus, substrate processing apparatus and method of transferring a processed article | Yasuhiro Sakamoto, Kiyohisa Tateyama, Shinzi Kitamura | 1997-05-06 |
| 5620560 | Method and apparatus for heat-treating substrate | Yasuhiro Sakamoto, Kouji Harada | 1997-04-15 |