Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685039 | Cleaning apparatus | Tomoko Hamada, Mitiaki Matsushita, Kiyohisa Tateyama | 1997-11-11 |
| 5686143 | Resist treating method | Hiroyuki Matsukawa, Michiaki Matsushita, Akihiro Fujimoto, Takashi Takekuma, Hidetami Yaegashi +1 more | 1997-11-11 |
| 5651160 | Cleaning apparatus for cleaning substrates | Masami Akimoto | 1997-07-29 |
| 5636401 | Cleaning apparatus and cleaning method | Nobukazu Ishizaka, Tomoko Hamada | 1997-06-10 |