Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5686143 | Resist treating method | Hiroyuki Matsukawa, Akira Yonemizu, Michiaki Matsushita, Akihiro Fujimoto, Hidetami Yaegashi +1 more | 1997-11-11 |
| 5665200 | Substrate processing method and substrate processing apparatus | Akihiro Fujimoto, Kiyomi Sonobe | 1997-09-09 |