KS

Kiyomi Sonobe

IC Iwaki Co.: 1 patents #1 of 3Top 35%
TL Tokyo Electron Kyushu Limited: 1 patents #12 of 39Top 35%
TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
Overall (1997): #181,418 of 185,788Top 100%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5665200 Substrate processing method and substrate processing apparatus Akihiro Fujimoto, Takashi Takekuma 1997-09-09