Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5686143 | Resist treating method | Hiroyuki Matsukawa, Akira Yonemizu, Michiaki Matsushita, Takashi Takekuma, Hidetami Yaegashi +1 more | 1997-11-11 |
| 5672205 | Coating apparatus | Yasuhiro Sakamoto | 1997-09-30 |
| 5665200 | Substrate processing method and substrate processing apparatus | Takashi Takekuma, Kiyomi Sonobe | 1997-09-09 |
| 5658615 | Method of forming coating film and apparatus therefor | Keizo Hasebe, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura, Masatoshi Deguchi +1 more | 1997-08-19 |
| 5644248 | Test head cooling system | — | 1997-07-01 |