Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5672205 | Coating apparatus | Akihiro Fujimoto | 1997-09-30 |
| 5664254 | Substrate processing apparatus and substrate processing method | Jun Ohkura, Naruaki Iida, Hiroyuki Kudou, Masanori Tateyama | 1997-09-02 |
| 5636182 | Portable ultrasonic underwater sensor | Hideyuki Suzuki, Kimihiko Yazawa | 1997-06-03 |
| 5626675 | Resist processing apparatus, substrate processing apparatus and method of transferring a processed article | Masami Akimoto, Kiyohisa Tateyama, Shinzi Kitamura | 1997-05-06 |
| 5620560 | Method and apparatus for heat-treating substrate | Masami Akimoto, Kouji Harada | 1997-04-15 |