Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5681614 | Hydrophobic treatment method involving delivery of a liquid process agent to a process space | Tsutae Omori, Takami Satoh, Noriyuki Anai, Masafumi Nomura | 1997-10-28 |
| 5620560 | Method and apparatus for heat-treating substrate | Masami Akimoto, Yasuhiro Sakamoto | 1997-04-15 |