Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688322 | Apparatus for coating resist on substrate | Kimio Motoda, Kiyohisa Tateyama | 1997-11-18 |
| 5681614 | Hydrophobic treatment method involving delivery of a liquid process agent to a process space | Tsutae Omori, Kouji Harada, Takami Satoh, Masafumi Nomura | 1997-10-28 |
| 5671764 | Washing apparatus, and washing method | Shinya Murakami, Yuuji Kamikawa, Sinichiro Izumi, Takami Satoh, Hirofumi Shiraishi +3 more | 1997-09-30 |