TO

Tetu Ohsawa

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
TL Tokyo Electron Tohoku Limited: 1 patents #5 of 36Top 15%
Overall (1997): #69,686 of 185,788Top 40%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5645391 Substrate transfer apparatus, and method of transferring substrates Kiyohisa Tateyama 1997-07-08