Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663637 | Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool | Leping Li, Gary R. Doyle, Arnold Halperin, Kevin L. Holland, Francis Walter Kazak +4 more | 1997-09-02 |
| 5660672 | In-situ monitoring of conductive films on semiconductor wafers | Leping Li, Arnold Halperin, Tony F. Heinz | 1997-08-26 |
| 5659492 | Chemical mechanical polishing endpoint process control | Leping Li, Arnold Halperin | 1997-08-19 |
| 5648113 | Aluminum oxide LPCVD system | Jonathan D. Chapple-Sokol, Richard A. Conti, Richard Hsiao, James A. O'Neill, Narayana V. Sarma +3 more | 1997-07-15 |
| 5644221 | Endpoint detection for chemical mechanical polishing using frequency or amplitude mode | Leping Li, Arnold Halperin | 1997-07-01 |
| 5614247 | Apparatus for chemical vapor deposition of aluminum oxide | Richard A. Conti, Alexander Kostenko, Narayana V. Sarma, Donald L. Wilson, Justin W. Wong +1 more | 1997-03-25 |