Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5660672 | In-situ monitoring of conductive films on semiconductor wafers | Leping Li, Steven G. Barbee, Arnold Halperin | 1997-08-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5660672 | In-situ monitoring of conductive films on semiconductor wafers | Leping Li, Steven G. Barbee, Arnold Halperin | 1997-08-26 |