Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663637 | Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool | Leping Li, Steven G. Barbee, Gary R. Doyle, Kevin L. Holland, Francis Walter Kazak +4 more | 1997-09-02 |
| 5660672 | In-situ monitoring of conductive films on semiconductor wafers | Leping Li, Steven G. Barbee, Tony F. Heinz | 1997-08-26 |
| 5659492 | Chemical mechanical polishing endpoint process control | Leping Li, Steven G. Barbee | 1997-08-19 |
| 5644221 | Endpoint detection for chemical mechanical polishing using frequency or amplitude mode | Leping Li, Steven G. Barbee | 1997-07-01 |
| 5621327 | System and method for testing and fault isolation of high density passive boards and substrates | Shinwu Chiang, Huntington W. Curtis, Arthur E. Falls, John P. Karidis, John D. Mackay +3 more | 1997-04-15 |