Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663637 | Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool | Steven G. Barbee, Gary R. Doyle, Arnold Halperin, Kevin L. Holland, Francis Walter Kazak +4 more | 1997-09-02 |
| 5660672 | In-situ monitoring of conductive films on semiconductor wafers | Steven G. Barbee, Arnold Halperin, Tony F. Heinz | 1997-08-26 |
| 5659492 | Chemical mechanical polishing endpoint process control | Steven G. Barbee, Arnold Halperin | 1997-08-19 |
| 5644221 | Endpoint detection for chemical mechanical polishing using frequency or amplitude mode | Steven G. Barbee, Arnold Halperin | 1997-07-01 |