Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663637 | Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool | Leping Li, Steven G. Barbee, Gary R. Doyle, Arnold Halperin, Francis Walter Kazak +4 more | 1997-09-02 |