Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665608 | Method of aluminum oxide low pressure chemical vapor deposition (LPCVD) system-fourier transform infrared (FTIR) source chemical control | Jonathan D. Chapple-Sokol, Richard A. Conti, James A. O'Neill, Donald L. Wilson, Justin W. Wong | 1997-09-09 |
| 5648113 | Aluminum oxide LPCVD system | Steven G. Barbee, Jonathan D. Chapple-Sokol, Richard A. Conti, Richard Hsiao, James A. O'Neill +3 more | 1997-07-15 |
| 5614247 | Apparatus for chemical vapor deposition of aluminum oxide | Steven G. Barbee, Richard A. Conti, Alexander Kostenko, Donald L. Wilson, Justin W. Wong +1 more | 1997-03-25 |