Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5687947 | Mounting method | Kazunori Iwamoto, Takao Kariya, Ryuichi Ebinuma, Hiroshi Chiba, Shinkichi Ohkawa | 1997-11-18 |
| 5680428 | Process for holding an object | Mitsuaki Amemiya | 1997-10-21 |
| 5641264 | Substrate conveying device and method of controlling the same | Mitsutoshi Kuno, Hidehiko Fujioka, Nobutoshi Mizusawa, Yuji Chiba, Takao Kariya +2 more | 1997-06-24 |
| 5610965 | Exposure method | Makiko Mori, Kunitaka Ozawa, Koji Uda, Isamu Shimoda, Eiji Sakamoto | 1997-03-11 |