Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5641264 | Substrate conveying device and method of controlling the same | Mitsutoshi Kuno, Nobutoshi Mizusawa, Yuji Chiba, Takao Kariya, Koji Uda +2 more | 1997-06-24 |
| 5593800 | Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus | Noriyuki Nose, Ryuichi Ebinuma, Shinichi Hara, Hiroshi Maehara | 1997-01-14 |