Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5641264 | Substrate conveying device and method of controlling the same | Hidehiko Fujioka, Nobutoshi Mizusawa, Yuji Chiba, Takao Kariya, Koji Uda +2 more | 1997-06-24 |
| 5640440 | Substrate conveying system | Kazunori Iwamoto, Mitsuji Marumo | 1997-06-17 |