Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5687947 | Mounting method | Shunichi Uzawa, Takao Kariya, Ryuichi Ebinuma, Hiroshi Chiba, Shinkichi Ohkawa | 1997-11-18 |
| 5684856 | Stage device and pattern transfer system using the same | Hirohito Itoh, Shinji Ohishi, Nobushige Korenaga, Youzou Fukagawa, Toshiya Asano +1 more | 1997-11-04 |
| 5640440 | Substrate conveying system | Mitsutoshi Kuno, Mitsuji Marumo | 1997-06-17 |