Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5684856 | Stage device and pattern transfer system using the same | Hirohito Itoh, Shinji Ohishi, Kazunori Iwamoto, Youzou Fukagawa, Toshiya Asano +1 more | 1997-11-04 |
| 5681638 | Substrate, and method and apparatus for holding the substrate | — | 1997-10-28 |