Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5684856 | Stage device and pattern transfer system using the same | Hirohito Itoh, Kazunori Iwamoto, Nobushige Korenaga, Youzou Fukagawa, Toshiya Asano +1 more | 1997-11-04 |
| 5666038 | Positioning table device including correction of energization electric current to selected coils of a permanent magnet of a drive device | — | 1997-09-09 |