Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5684856 | Stage device and pattern transfer system using the same | Shinji Ohishi, Kazunori Iwamoto, Nobushige Korenaga, Youzou Fukagawa, Toshiya Asano +1 more | 1997-11-04 |
HI
Hirohito Itoh
Overall (1997): #142,065 of 185,788Top 80%
1
Patents 1997