Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5687947 | Mounting method | Kazunori Iwamoto, Shunichi Uzawa, Takao Kariya, Hiroshi Chiba, Shinkichi Ohkawa | 1997-11-18 |
| 5623529 | SOR exposure system and mask manufactured thereby | Yutaka Watanabe | 1997-04-22 |
| 5593800 | Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus | Hidehiko Fujioka, Noriyuki Nose, Shinichi Hara, Hiroshi Maehara | 1997-01-14 |