Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5657113 | Document exposure apparatus | Katsuhiko Ono, Tsuyoshi Seto | 1997-08-12 |
| 5641593 | Lithographic mask and exposure apparatus using the same | Masami Hayashida | 1997-06-24 |
| 5623529 | SOR exposure system and mask manufactured thereby | Ryuichi Ebinuma | 1997-04-22 |
| 5606586 | X-ray exposure method and apparatus and device manufacturing method | Mitsuaki Amemiya, Yasuaki Fukuda, Akira Miyake | 1997-02-25 |
| 5604779 | Optical exposure method and device formed by the method | Mitsuaki Amemiya | 1997-02-18 |
| 5598712 | Latent heat accumulation system | Takayuki Hachimonji, Katsuya Yamashita, Sanae Sekita, Tsuyoshi Noma | 1997-02-04 |