Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5680428 | Process for holding an object | Shunichi Uzawa | 1997-10-21 |
| 5606586 | X-ray exposure method and apparatus and device manufacturing method | Yasuaki Fukuda, Yutaka Watanabe, Akira Miyake | 1997-02-25 |
| 5604779 | Optical exposure method and device formed by the method | Yutaka Watanabe | 1997-02-18 |