Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656398 | Method of making X-ray mask structure | Takeshi Miyachi, Keiko Chiba | 1997-08-12 |
| 5607733 | Process for preparing an X-ray mask structure | Shigeyuki Matsumoto | 1997-03-04 |
| 5606586 | X-ray exposure method and apparatus and device manufacturing method | Mitsuaki Amemiya, Yutaka Watanabe, Akira Miyake | 1997-02-25 |