Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656398 | Method of making X-ray mask structure | Yasuaki Fukuda, Keiko Chiba | 1997-08-12 |
| 5600698 | X-ray exposure apparatus | Shigeru Terashima | 1997-02-04 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656398 | Method of making X-ray mask structure | Yasuaki Fukuda, Keiko Chiba | 1997-08-12 |
| 5600698 | X-ray exposure apparatus | Shigeru Terashima | 1997-02-04 |