Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5657113 | Document exposure apparatus | Tsuyoshi Seto, Yutaka Watanabe | 1997-08-12 |
| 5622593 | Plasma processing apparatus and method | Masashi Arasawa, Hiroshi Nishikawa, Kazuo Tsuchiya | 1997-04-22 |