Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5593800 | Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus | Hidehiko Fujioka, Noriyuki Nose, Ryuichi Ebinuma, Shinichi Hara | 1997-01-14 |