Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5610718 | Apparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizes | Koichi Sentoku, Takahiro Matsumoto, Minoru Yoshii, Kenji Saitoh | 1997-03-11 |
| 5593800 | Mask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatus | Hidehiko Fujioka, Ryuichi Ebinuma, Shinichi Hara, Hiroshi Maehara | 1997-01-14 |