Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5652657 | Inspection system for original with pellicle | Michio Kohno, Seiya Miura, Kyoichi Miyazaki, Toshihiko Tsuji, Seiji Takeuchi | 1997-07-29 |
| 5610715 | Displacement detecting system, an expose apparatus, and a device manufacturing method employing a scale whose displacement is detected by a selected detection head | Kyoichi Miyazaki, Seiji Takeuchi | 1997-03-11 |
| 5610718 | Apparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizes | Koichi Sentoku, Takahiro Matsumoto, Noriyuki Nose, Kenji Saitoh | 1997-03-11 |