Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5652657 | Inspection system for original with pellicle | Minoru Yoshii, Michio Kohno, Seiya Miura, Kyoichi Miyazaki, Toshihiko Tsuji | 1997-07-29 |
| 5610715 | Displacement detecting system, an expose apparatus, and a device manufacturing method employing a scale whose displacement is detected by a selected detection head | Minoru Yoshii, Kyoichi Miyazaki | 1997-03-11 |