Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5652657 | Inspection system for original with pellicle | Minoru Yoshii, Seiya Miura, Kyoichi Miyazaki, Toshihiko Tsuji, Seiji Takeuchi | 1997-07-29 |
| 5602639 | Surface-condition inspection method and apparatus including a plurality of detecting elements located substantially at a pupil plane of a detection optical system | — | 1997-02-11 |
| 5591985 | Surface state inspecting system including a scanning optical system for scanning a surface to be inspected with a first light and for simultaneously scanning a diffraction grating with a second light | Toshihiko Tsuji | 1997-01-07 |