Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5641264 | Substrate conveying device and method of controlling the same | Mitsutoshi Kuno, Hidehiko Fujioka, Nobutoshi Mizusawa, Yuji Chiba, Takao Kariya +2 more | 1997-06-24 |
| 5610965 | Exposure method | Makiko Mori, Kunitaka Ozawa, Isamu Shimoda, Shunichi Uzawa, Eiji Sakamoto | 1997-03-11 |