Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5640098 | IC fault analysis system having charged particle beam tester | Hironobu Niijima, Hiroshi Kawamoto, Masayuki Kurihara, Toshimichi Iwai | 1997-06-17 |
| 5640539 | IC analysis system having charged particle beam apparatus for improved contrast image | Masayuki Kurihara, Koshi Ueda | 1997-06-17 |
| 5633595 | IC analysis system and electron beam probe system and fault isolation method therefor | Koshi Ueda, Masayuki Kuribara | 1997-05-27 |
| 5592099 | IC tester joined with ion beam tester and the detection method of the failure part of IC | Masayuki Kuribara, Koshi Ueda | 1997-01-07 |