Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5640098 | IC fault analysis system having charged particle beam tester | Hironobu Niijima, Hiroshi Kawamoto, Akira Goishi, Toshimichi Iwai | 1997-06-17 |
| 5640539 | IC analysis system having charged particle beam apparatus for improved contrast image | Akira Goishi, Koshi Ueda | 1997-06-17 |