Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5640098 | IC fault analysis system having charged particle beam tester | Hiroshi Kawamoto, Akira Goishi, Masayuki Kurihara, Toshimichi Iwai | 1997-06-17 |
| 5592100 | Method for detecting an IC defect using charged particle beam | Soichi Shida, Hiroshi Kawamoto | 1997-01-07 |