Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5356835 | Method for forming low resistance and low defect density tungsten contacts to silicon semiconductor wafer | Sasson Somekh, Jaim Nulman | 1994-10-18 |
| 5326725 | Clamping ring and susceptor therefor | Semyon Sherstinsky, Charles C. Harris, Dale R. Du Bois, James Roberts, Susan Telford +3 more | 1994-07-05 |
| 5316278 | Clamping ring apparatus for processing semiconductor wafers | Semyon Sherstinsky, Charles C. Harris, Alfred Mak, James Roberts, Simon W. Tam +1 more | 1994-05-31 |