Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5328872 | Method of integrated circuit manufacturing using deposited oxide | Ajit S. Manocha, Virendra V. Rana, Ankineedu Velaga | 1994-07-12 |
| 5326725 | Clamping ring and susceptor therefor | Semyon Sherstinsky, Charles C. Harris, Mei Chang, Dale R. Du Bois, Susan Telford +3 more | 1994-07-05 |
| 5316278 | Clamping ring apparatus for processing semiconductor wafers | Semyon Sherstinsky, Mei Chang, Charles C. Harris, Alfred Mak, Simon W. Tam +1 more | 1994-05-31 |