Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5326725 | Clamping ring and susceptor therefor | Semyon Sherstinsky, Mei Chang, Dale R. Du Bois, James Roberts, Susan Telford +3 more | 1994-07-05 |
| 5316278 | Clamping ring apparatus for processing semiconductor wafers | Semyon Sherstinsky, Mei Chang, Alfred Mak, James Roberts, Simon W. Tam +1 more | 1994-05-31 |