Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5326725 | Clamping ring and susceptor therefor | Charles C. Harris, Mei Chang, Dale R. Du Bois, James Roberts, Susan Telford +3 more | 1994-07-05 |
| 5316278 | Clamping ring apparatus for processing semiconductor wafers | Mei Chang, Charles C. Harris, Alfred Mak, James Roberts, Simon W. Tam +1 more | 1994-05-31 |
| 5292399 | Plasma etching apparatus with conductive means for inhibiting arcing | Terrance Y. Lee, Fred C. Redeker, Petru N. Nitescu, Robert Steger, David W. Groechel +2 more | 1994-03-08 |