Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5356486 | Combined wafer support and temperature monitoring device | Michael Sugarman, Michael Beesely, Shannon J. Kelsey | 1994-10-18 |
| 5308417 | Uniformity for magnetically enhanced plasma chambers | David W. Groechel, Masato Toshima, Jerry Wong, Tetsuya Ishikawa, Regga Tekeste +2 more | 1994-05-03 |
| 5292399 | Plasma etching apparatus with conductive means for inhibiting arcing | Terrance Y. Lee, Fred C. Redeker, Petru N. Nitescu, David W. Groechel, Semyon Sherstinsky +2 more | 1994-03-08 |