Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5350479 | Electrostatic chuck for high power plasma processing | Kenneth S. Collins, John Trow, Joshua Chiu-Wing Tsui, Craig A. Roderick, Nicolas Bright +1 more | 1994-09-27 |
| 5308417 | Uniformity for magnetically enhanced plasma chambers | David W. Groechel, Masato Toshima, Robert Steger, Jerry Wong, Regga Tekeste +2 more | 1994-05-03 |