Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5356486 | Combined wafer support and temperature monitoring device | Michael Beesely, Shannon J. Kelsey, Robert Steger | 1994-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5356486 | Combined wafer support and temperature monitoring device | Michael Beesely, Shannon J. Kelsey, Robert Steger | 1994-10-18 |