Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5326725 | Clamping ring and susceptor therefor | Semyon Sherstinsky, Charles C. Harris, Mei Chang, James Roberts, Susan Telford +3 more | 1994-07-05 |
| 5320680 | Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flow | Arthur J. Learn, Nicholas Miller, Richard A. Seilheimer | 1994-06-14 |