Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5328722 | Metal chemical vapor deposition process using a shadow ring | Steve Ghanayem | 1994-07-12 |
| 5328872 | Method of integrated circuit manufacturing using deposited oxide | Ajit S. Manocha, James Roberts, Ankineedu Velaga | 1994-07-12 |
| 5292554 | Deposition apparatus using a perforated pumping plate | Ashok Sinha, Steve Ghanayem | 1994-03-08 |