Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5360996 | Titanium nitride/titanium silicide multiple layer barrier with preferential (111) crystallographic orientation on titanium nitride surface | Kenny King-Tai Ngan | 1994-11-01 |
| 5356835 | Method for forming low resistance and low defect density tungsten contacts to silicon semiconductor wafer | Sasson Somekh, Mei Chang | 1994-10-18 |
| 5288665 | Process for forming low resistance aluminum plug in via electrically connected to overlying patterned metal layer for integrated circuit structures | — | 1994-02-22 |