Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5356835 | Method for forming low resistance and low defect density tungsten contacts to silicon semiconductor wafer | Jaim Nulman, Mei Chang | 1994-10-18 |
| 5294320 | Apparatus for cleaning a shield in a physical vapor deposition chamber | Dan Maydan | 1994-03-15 |
| 5292393 | Multichamber integrated process system | Dan Maydan, David N. Wang, David Cheng, Masato Toshima, Isaac Harari +1 more | 1994-03-08 |
| 5280983 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Charles Ryan-Harris, Richard A. Seilheimer, David Cheng, Edward M. Abolnikov +5 more | 1994-01-25 |