Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5369286 | Method and apparatus for measuring stress in a film applied to surface of a workpiece | — | 1994-11-29 |
| 5304248 | Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions | Mei Cheng | 1994-04-19 |
| 5292393 | Multichamber integrated process system | Dan Maydan, Sasson Somekh, David N. Wang, Masato Toshima, Isaac Harari +1 more | 1994-03-08 |
| 5280983 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Sasson Somekh, Charles Ryan-Harris, Richard A. Seilheimer, Edward M. Abolnikov +5 more | 1994-01-25 |